设计了一种应用于准分子激光器的高精度温度控制系统,可对准分子 激光器放电腔的温度进行实时采集、 显示、控制,达到维持激光器腔体温度恒定的目的,从而改善激光器的工作性能如能量稳定性和使用寿命等。 系统采用飞思卡尔单片机,以比例阀作为控温执行器件,并且设计了软硬件和优化的控制算法。实验结果 表明:在三种不同PID控制方式下,系统控制精度皆能达到±0.2°C;在改进的智能PID控制下,系统超调变小、 调节时间减少;在100 Hz和500 Hz不同重频条件下,系统采用智能PID控制时,运行稳定。因此,本系统可为激 光器的运行提供良好的温度控制环境。

A high precision temperature control system of excimer laser was proposed. The system can sample the temperature of the chamber of excimer laser in real time, and then display and control it. So the constant temperature of excimer laser chamber can be achieved which can improve the working performance of the excimer such as energy stability and working life. The system used Freescale chip as controller, and proportional valve as its executive component. Meanwhile, the software, hardware and optimization control algorithm were designed. Experimental results show that under the three different PID control ways, the control precision of the system is ±0.2°C. Under the improved intelligent control, system overshoot is smaller and response time is reduced. At the pulse rate of 100 Hz and 500 Hz, the system can run steadily. So the system can provide a favorable temperature environment for the laser’s operation.