光学学报, 2015, 35 (12): 1211002, 网络出版: 2015-11-30
利用泽尼克位相型光瞳滤波器实现景深延拓及超分辨
Depth of Field Extending and Super-Resolving with Phase Pupil Filter of Zernike Polynomials
成像系统 光瞳滤波器 景深延拓 超分辨 泽尼克多项式 imaging systems phase pupil filter depth of field extending super-resolving Zernike polynomials
摘要
为了对显微光学系统实现景深延拓和超分辨,设计了一种基于泽尼克多项式的位相型光瞳滤波器,并分析了其对光学系统在焦点附近光强分布的改善。结果表明,与传统显微光学系统相比,加入泽尼克位相型光瞳滤波器后,系统景深延拓了4.15倍,分辨率提升了1.3倍。同时,与其他两种形式的光瞳滤波器进行了比较,进一步说明了泽尼克位相型光瞳滤波器的优势。设计的泽尼克位相型光瞳滤波器在疵病的显微检测中具有一定的实际意义和应用价值。
Abstract
In order to extend the depth of field and enhance the resolution of microscopy system, a phase pupil filter with Zernike polynomials is proposed. Through analysis of intensity distribution near the focus point, its improvement for optical imaging system is demonstrated. Results show that depth of field is extended 4.15 times as well as resolution is increased 1.3 times. In addition, the performance of Zernike phase pupil is compared with the other phase pupil filters manifesting its advantages. This new type phase pupil with Zernike polynomials has practicability and applied value in flaw detection with microscopy.
刘江, 苗二龙, 王学亮, 隋永新, 杨怀江. 利用泽尼克位相型光瞳滤波器实现景深延拓及超分辨[J]. 光学学报, 2015, 35(12): 1211002. Liu Jiang, Miao Erlong, Wang Xueliang, Sui Yongxin, Yang Huaijiang. Depth of Field Extending and Super-Resolving with Phase Pupil Filter of Zernike Polynomials[J]. Acta Optica Sinica, 2015, 35(12): 1211002.