太赫兹科学与电子信息学报, 2015, 13 (5): 679, 网络出版: 2015-11-30
截止频率8.7 THz 的平面肖特基势垒二极管
Planar Schottky Barrier Diode with cut-off frequency of 8.7 THz
太赫兹 肖特基势垒二极管 串联电阻 零偏结电容 截止频率 terahertz Schottky Barrier Diodes series resistance junction capacitance cut-off frequency
摘要
肖特基势垒二极管(SBD)具有强非线性效应、速度快及容易系统集成等特点，常用于微波、毫米波及太赫兹波的产生和检测。本文通过电子束光刻等技术制作出肖特基接触直径1 μm的二极管，并对二极管进行了直流测试和射频测试。经过直流测试，二极管的串联电阻为10.2 Ω，零偏结电容为1.76 fF，肖特基结截止频率达到了8.7 THz；相同管子的射频测试串联电阻为15.4 Ω，零偏结电容1.46 fF，肖特基结截止频率也达到了7 THz。
Abstract
A planar Schottky Barrier Diode(SBD) with the Schottky contact diameter of 1 μm fabricated using electron beam lithography method is reported. The DC measurement results show that the DC series resistance, the junction capacitance and the cut-off frequency of SBD are 10.2 Ω, 1.76 fF and 8.7 THz, respectively; the RF extracted series resistance of 15.4 Ω, the junction capacitance of 1.46 fF and the cut-off frequency of 7 THz are also demonstrated.
李倩, 安宁, 童小东, 王文杰, 曾建平, 李志强, 唐海林, 熊永忠. 截止频率8.7 THz 的平面肖特基势垒二极管[J]. 太赫兹科学与电子信息学报, 2015, 13(5): 679. 李倩, 安宁, 童小东, 王文杰, 曾建平, 李志强, 唐海林, 熊永忠. Planar Schottky Barrier Diode with cut-off frequency of 8.7 THz[J]. Journal of terahertz science and electronic information technology, 2015, 13(5): 679.
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