静电平行板驱动器是基于静电驱动的MEMS变形镜的关键部件,其静态及动态性能对MEMS变形镜有重要影响。设计并利用表面硅工艺加工制作了三种基于不同弹性系数的静电平行板驱动器的MEMS变形镜,分别采用解析公式和有限元仿真方法分析了弹性系数对变形镜的三项性能参数即行程、吸合电压和固有频率的影响,并利用白光表面轮廓仪进行实验测试,验证了理论和仿真结果的有效性。实验结果表明三种变形镜中半圆环梁驱动器变形镜具有适中的吸合电压和较大的行程,最适合于自适应光学系统的应用需求。

Electrostatic parallelplate actuator is one of the key components of MEMS deformable mirror based on electrostatic actuator. Its static and dynamic characteristics have important influence on MEMS deformable mirror. Three kinds of deformable mirror based on electrostatic parallelplate actuators with different spring constant were designed and fabricated by surface micromachined process. Analytic formula and FEA simulation were adopted to analyze the effect of spring constant on three characteristics of DM,including stroke,pullin voltage and natural frequency. The experimental measurement is applied by white light surface profiler and the effectiveness of theory and simulation results is verified. The results show that among them the DM with semiring beam actuator has the medium pullin voltage and large stroke and it is the most suitable DM to adaptive optics.