强激光与粒子束, 2015, 27 (11): 112008, 网络出版: 2015-11-30
大气常压等离子射流清洗溶胶-凝胶SiO2膜表面油脂污染物
Atmosphere pressure plasma cleaning of grease contamination on sol-gel SiO2 coating
大气常压等离子射流 溶胶-凝胶SiO2膜 高功率激光真空系统 油脂污染物 激光损伤阈值 atmosphere pressure plasma jet sol-gel SiO2 coating vacuum system of high power laser grease contamination laser induced damage threshold
摘要
采用大气常压等离子射流技术对溶胶-凝胶SiO2膜表面的油脂污染物进行清洗。利用分光光度计、扫描电子显微镜、红外光谱仪对溶胶-凝胶SiO2膜透过率、表面形貌、化学结构进行表征，并分析清洗前后溶胶-凝胶SiO2膜的激光损伤阈值变化。损伤阈值测试表明，1064 nm波长的激光损伤阈值由污染后的16.08 J/cm2上升到24.41 J/cm2，与污染前24.72 J/cm2的损伤阈值相当。同时还获取清洗的最佳时间为10 s。清洗前后，溶胶-凝胶SiO2膜保持完好，且未产生新的有机污染物。研究结果表明：大气常压等离子射流技术可对溶胶-凝胶SiO2膜表面的油脂污染物进行有效地清洗，从而提高溶胶-凝胶SiO2膜的透过率和激光损伤阈值，为高功率激光装置的稳定运行提供保障。
Abstract
Atmosphere pressure plasma cleaning was utilized to clean grease contamination on the surface of sol-gel SiO2 coating on K9 glass. The optical property and laser-induced damage threshold of sol-gel coating were investigated by spectrophotometer, scanning electrical microscope and infrared spectrometer, respectively. After cleaning, the laser-induced damage threshold increased from 16.08 J/cm2 to 24.41 J/cm2 with irradiated by 1064 nm, approximate to the laser-induced damage threshold before pollution. The experimental results showed that the grease contamination on the sol-gel SiO2 coating could be well cleaned by atmosphere pressure plasma jet without the coating damaged and contamination residual by properly controlling the technological parameters.
刘昊, 苗心向, 杨科, 吕海兵, 邹睿, 周国瑞, 程晓峰, 严鸿维, 袁晓东, 贾宝申. 大气常压等离子射流清洗溶胶-凝胶SiO2膜表面油脂污染物[J]. 强激光与粒子束, 2015, 27(11): 112008. Liu Hao, Miao Xinxiang, Yang Ke, Lü Haibing, Zou Rui, Zhou Guorui, Cheng Xiaofeng, Yan Hongwei, Yuan Xiaodong, Jia Baoshen. Atmosphere pressure plasma cleaning of grease contamination on sol-gel SiO2 coating[J]. High Power Laser and Particle Beams, 2015, 27(11): 112008.
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