液晶与显示, 2015, 30 (5): 813, 网络出版: 2015-11-30
一种实用的PECVD腔体检漏工具设计方法
Practical design method of PECVD cavity check-up tool
摘要
在TFT-LCD行业,PECVD设备主要用于Array TFT基板工艺中的气相沉积;产生的非金属膜层,为金属电路提供保护、开关作用;在PECVD工艺制程中,腔体设计复杂,反应条件苛刻,产生的制程物会造成产品不良,故需要定期进行PM(pre maintenance预防性维护)。本文以PECVD PM作业为背景,针对设备PM耗时长的问题,制定了改善方法,并着重介绍了腔体检漏工具的设计过程。设计制作了一台国产化检漏工具,成功运用于量产。通过测试,检漏工具3 min内达到10 mT(1 mT=0.133 Pa),漏率为0.45 mT/min,基本符合设备Spec.(标准)要求。
Abstract
In TFT - LCD industry,PECVD equipment is mainly used for the vapor deposition in the process of Array TFT to produce non-metal film layer,which protects and switches metal circuit . In PECVD process,cavity design is complex and reaction conditions are harsh,the process will lead to bad products,so we need to do pre-maintenance on a regular basis. On the background of PECVD PM,we improved the method and emphatically introduced the cavity check-up leak tool design process because of the time-consuming of PM. We designed a domestic leak detection tool,and applied it into mass producing successfully. Final test results showed that pressure reached to 10 mT in 3 min and the leakage rate is 0.45 mT/min,which accord with the equipment standard.
周梁, 韩大伟, 孙泉钦, 王丹名, 李华, 陈垚. 一种实用的PECVD腔体检漏工具设计方法[J]. 液晶与显示, 2015, 30(5): 813. ZHOU Liang, HAN David, SUN Quan-qin, WANG Dan-ming, LI Hua, CHEN Yao. Practical design method of PECVD cavity check-up tool[J]. Chinese Journal of Liquid Crystals and Displays, 2015, 30(5): 813.