在波前校正过程中，变形镜(DM)在强激光连续辐照(CW)下会产生热形变，进而对入射光引入附加波前畸变，从而制约了变形镜的波前校正效果，致使光束质量改善效果变差。从变形镜热形变面形的Zernike 多项式分解出发，建立了强激光连续辐照下变形镜的热形变预估模型，根据预估所得的热形变面形，模拟计算得到了变形镜的驱动器控制信号参数，进而驱动变形镜对其自身的热形变面形进行了实时补偿。仿真结果表明，该自校正方法能有效补偿变形镜自身的热形变面形，减小变形镜热形变对其校正能力的影响；采用局部换热方式只能在一定程度上减小变形镜形变面形引起的平移相差和离焦相差，对光束质量的改善效果也比较有限，而该自校正方法能有效减小热形变引起的光程差，从而对光束质量起到明显的改善作用。

In the process of wavefront correction, the thermal deformation appears on deformable mirrors(DMs) radiated by high-power continuous wave (CW) laser, leading to the additional wavefront distortion to the incident laser, and further the restriction of the correction ability of deformable mirror and the degradation of the beam quality. A prediction model of deformable mirror with thermal deformation radiated by high-power continuous wave laser is presented based on Zernike polynomial decomposition. According to the prediction of the thermal deformation of the deformable mirror, the control signal of the actuators have been obtained by finite element simulation, and further control the actuators to compensate the thermal deformation distribution of the deformable mirror in real time. Simulation results indicate that,the self- correction method can compensate the thermal deformation distribution of the deformable mirror effectively and reduce the influence of thermal deformation on the correction ability of the deformable mirror. As a reference, the local heat transfer method can only reduce the piston and defocus of the distorted wavefront caused by the thermal deformation of the deformable mirror to a certain extent, and the effect on beam quality is not efficient enough. However, the self-correction method can eliminate almost all the optical path difference caused by the thermal deformation of the deformable mirror and further improve the beam quality effectively.