光学学报, 2015, 35 (12): 1206005, 网络出版: 2015-12-10
基于L 形刚性梁与弹性膜片结构的低频光纤光栅加速度传感器 下载: 565次
Fiber Bragg Grating Accelerometer Based on L-Shaped Rigid Beam and Elastic Diaphragm for Low-Frequency Vibration Measurement
传感器 加速度传感器 光纤布拉格光栅 低频 弹性膜片 sensors accelerometer fiber Bragg grating low-frequency elastic diaphragm
摘要
为满足低频振动信号精确测量的实际需要,设计了一种基于L 形刚性梁与弹性膜片结构的光纤布拉格光栅加速度传感器。进行了结构理论分析,并通过Matlab 仿真讨论了各结构参量对传感器灵敏度和谐振频率的影响,进行了参量优化设计。根据理论分析结果制作了加速度传感器并对其加速度灵敏度的幅频特性、线性响应和抗横向干扰特性进行了测试。实验结果表明,L形刚性梁的传动结构有效增强了结构稳定性,消除了传统悬臂梁结构带来的光纤光栅啁啾或反射谱多峰现象。加速度传感器在20~70 Hz的低频段具有平坦的灵敏度响应,加速度灵敏度可达220 pm/g,线性响应的相关度为99.98%;金属膜片使得该传感器具有较强的抗横向干扰能力,在工作频段内横向串扰为-32.73 dB。
Abstract
A fiber Bragg grating accelerometer based on L-shaped rigid beam and elastic diaphragm is designed for high- precision detection of low- frequency vibration signals. The structure of accelerometer is analyzed theoretically, and the influence of each parameter on the sensitivity and resonant frequency is discussed by simulation with Matlab. Optimization design is made on the basis of simulation. According to the analysis result, the accelerometer is made. The sensing performances that include amplitude- frequency characteristic, linear response and ability of resisting transverse interference in the cross-axis are tested experimentally. Experimental results show that the structure of accelerometer is stable by using L-shaped rigid beam. Also the chirp effect of grating and the multi-peak of reflective spectrum are avoided. The sensor has good performances in detection of low-frequency vibration signals because it has flat response from 20 Hz to 70 Hz and the sensitivity is about 220 pm/g with a linear coefficient of 99.98% . Elastic diaphragm used as elastic element efficiently eliminate transverse interference while the interference degree can be less than -32.73 dB.
曾宇杰, 王俊, 杨华勇, 马丽娜. 基于L 形刚性梁与弹性膜片结构的低频光纤光栅加速度传感器[J]. 光学学报, 2015, 35(12): 1206005. Zeng Yujie, Wang Jun, Yang Huayong, Ma Lina. Fiber Bragg Grating Accelerometer Based on L-Shaped Rigid Beam and Elastic Diaphragm for Low-Frequency Vibration Measurement[J]. Acta Optica Sinica, 2015, 35(12): 1206005.