为了满足航天红外遥感器光学元件透过率高、散热性好的要求，提出一种具有波长选择特性的网状微结构。采用等效介质理论、数学建模理论方法设计网状微结构特征参数，并通过Matlab软件辅助模拟微结构表面光谱辐射特性。运用离子刻蚀机制备网状微结构，通过扫描电子显微镜测量微结构表面形貌,并进行分析。根据结果判断反应气体流量、射频电源功率、反应腔内压强三个工艺参数对微结构形貌及微结构侧壁陡直度具有很大影响，以及确定最佳工艺参数组合。实验结果表明：在最佳工艺参数组合下制备的网状微结构，10.6 μm工作波长下透射衍射效率大于91.5%，基本满足红外遥感器对网状微结构光学特性的要求。

To reach the requirement of optical elements in the aerospace infrared remote sensor being highly transmissive and thermally diffusive, this paper proposed a reticular microstructure with the wavelength selection characteristic. The characteristic parameters of the reticular microstructure were designed based on the equivalent medium theory and mathematical modeling theory, and Matlab was used to simulate the spectral radiant characteristics on the reticular microstructure surface. The microstructure was fabricated by plasma etching, and its surface topography was analyzed by scanning electron microscope (SEM). The results reveal that the reactive gas flow rate, RF power and the chamber pressure are critical for the morphology of the microstructure and the steepness of sidewall. By optimizing and analyzing the parameters, the experimental results illustrate that the transmission diffraction efficiency of the microstructure achieved over 91.5% at an operating wavelength of 10.6 μm under optimized conditions. This can basically fulfill the requirement of reticular microstructure for aerospace infrared remote sensor utilization.