Chinese Optics Letters, 2015, 13 (12): 122301, Published Online: Sep. 12, 2018   

Linear variable filters fabricated by ion beam etching with triangle-shaped mask and normal film coating technique Download: 710次

Author Affiliations
Engineering Research Center of Optical Instruments and Systems, Ministry of Education and Shanghai Key Laboratory of Modern Optical Systems, University of Shanghai for Science and Technology, Shanghai 200093, China
Abstract
In this Letter, we propose a method of fabricating linear variable filters by ion beam etching with masking mechanisms. A triangle-shaped mask is designed and set between the ion source and sample. During the ion etching, the sample is moved back and forth repeatedly with a constant velocity for the purpose of obtaining the linearly varied thickness of the cavity. Combined with ion beam assistant thermal oxidative electron beam evaporation deposition technology, we finish the fabrication of linear variable filters, whose filtering range is from 500 to 580 nm. The measured results indicate that the transmittance and bandwidth at the peak wavelength are around 40% and 3 nm.

Bin Sheng, Peng Chen, Chunxian Tao, Ruijin Hong, Yuanshen Huang, Dawei Zhang. Linear variable filters fabricated by ion beam etching with triangle-shaped mask and normal film coating technique[J]. Chinese Optics Letters, 2015, 13(12): 122301.

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