Chinese Optics Letters, 2016, 14 (1): 011404, Published Online: Aug. 6, 2018
Grating-assisted fabrication of sub-wavelength ripples during femtosecond laser processing of dielectrics Download: 786次
Abstract
During the formation of sub-wavelength ripples, the initial surface plasmon (SP)-laser interference plays an important role. In this Letter, the effects of grating structures on the distribution of the absorbed laser intensity, SP-laser coupling, free electron distributions, and ablation shapes are investigated by the plasma model, taking into consideration both the laser wave-particle duality and the transient localized changes of material properties. The simulation results show that the grating structures can strongly enhance the energy absorption and SP-laser coupling, which makes the fabrication of sub-wavelength ripples more efficient. It is also found that the ablation shapes, in terms of ablation depths and sub-wavelength ripples periods, are strongly related to the grating structures, which can be used to control micro/nanostructures precisely and uniformly.
Yanping Yuan, Jimin Chen. Grating-assisted fabrication of sub-wavelength ripples during femtosecond laser processing of dielectrics[J]. Chinese Optics Letters, 2016, 14(1): 011404.