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Profile and roughness of electrorheological finishing optical surfaces

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Abstract

This paper focuses on the process of electrorheological (ER) finishing optical surfaces. Experiments on K9 mirrors were conducted. In one experiment, the operating distance was varied over 0.5–0.8 mm with the voltage at 2000 V. The maximum peak-to-valley (PV) reduction was obtained at the distance of 0.5 mm, where the PV value was reduced from 58.71 to 25.03 nm. In another experiment, the voltage was varied over 1500– 3000 V with operating distance at 0.5 mm. The final surface roughness (Ra) achieved was as low as 2.5 nm. A higher voltage produced a higher relative reduction of the Ra. These experimental results validated the process.

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DOI:10.1007/s12200-014-0401-y

所属栏目:RESREARCH ARTICLE

基金项目:This work was supported by the Research Grants Council of the Hong Kong Special Administrative Region (No. CityU120610).

收稿日期:2013-09-19

修改稿日期:2014-03-12

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作者单位    点击查看

Haobo CHENG:School of Optoelectronics, Joint Research Center for Optomechatronics Design and Engineering, Beijing Institute of Technology,Beijing 100081, China
Jingshi SU:School of Optoelectronics, Joint Research Center for Optomechatronics Design and Engineering, Beijing Institute of Technology,Beijing 100081, China
Yong CHEN:School of Optoelectronics, Joint Research Center for Optomechatronics Design and Engineering, Beijing Institute of Technology,Beijing 100081, China
Hon-Yuen TAM:Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Hong Kong, China

联系人作者:Haobo CHENG(chenghaobo@tsinghua.org.cn)

备注:Haobo Cheng is a current Professor Doctoral supervisor in the Beijing Institute of Technology. He received his Ph.D degree in Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences. He is also the dean of research institute in Zhuhai and director at the joint research center for opto-mechatronics engineering. The present research work is precision ultra-precision manufacturing and testing.

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引用该论文

Haobo CHENG,Jingshi SU,Yong CHEN,Hon-Yuen TAM. Profile and roughness of electrorheological finishing optical surfaces[J]. Frontiers of Optoelectronics, 2015, 8(3): 306-313

Haobo CHENG,Jingshi SU,Yong CHEN,Hon-Yuen TAM. Profile and roughness of electrorheological finishing optical surfaces[J]. Frontiers of Optoelectronics, 2015, 8(3): 306-313

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