Photonics Research, 2015, 3 (4): 04000110, Published Online: Jan. 6, 2016  

Growth of large-area atomically thin MoS2 film via ambient pressure chemical vapor deposition Download: 1642次

Author Affiliations
1 Institute of Functional Nano and Soft Materials (FUNSOM), Jiangsu Key Laboratory for Carbon-Based Functional Materials and Devices, and Collaborative Innovation Center of Suzhou Nano Science and Technology, Soochow University, Suzhou 215123, China
2 Department of Materials Engineering, Monash University, Clayton, Victoria 3800, Australia
Abstract
Atomically thin MoS2 films have attracted significant attention due to excellent electrical and optical properties. The development of device applications demands the production of large-area thin film which is still an obstacle. In this work we developed a facile method to directly grow large-area MoS2 thin film on SiO2 substrate via ambient pressure chemical vapor deposition method. The characterizations by spectroscopy and electron microscopy reveal that the as-grown MoS2 film is mainly bilayer and trilayer with high quality. Back-gate field-effect transistor based on such MoS2 thin film shows carrier mobility up to 3.4 cm2 V?1 s?1 and on/off ratio of 105. The large-area atomically thin MoS2 prepared in this work has the potential for wide optoelectronic and photonic device applications.

Caiyun Chen, Hong Qiao, Yunzhou Xue, Wenzhi Yu, Jingchao Song, Yao Lu, Shaojuan Li, Qiaoliang Bao. Growth of large-area atomically thin MoS2 film via ambient pressure chemical vapor deposition[J]. Photonics Research, 2015, 3(4): 04000110.

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