提出了一种通过湿法腐蚀实现的基板缺陷共面波导电磁带隙结构，并进行了建模仿真、加工和测试。重点研究了基板缺陷结构与传统金属缺陷结构的差异，以及采用湿法腐蚀工艺的优势。实验结果显示：新结构具有明显的电磁带隙特性；与干法刻蚀工艺相比，采用湿法腐蚀工艺加工可以获得更宽的阻带范围和更强的阻带抑制。该结构完整保留了50Ω共面波导的信号线和接地板金属，可以与传统的金属缺陷结构结合，以获得性能更好的器件。

Traditional study on Electromagnetic Band-Gap (EBG) structures often focuses on the pattern of signal trace metal and Defected Ground Structure (DGS). In this paper, a Substrate-Defected Coplanar Waveguide (SD-CPW) was obtained by wet-etching the substrate to periodic pits. The differences between substrate-defected structure and traditional EBG structures was studied and also the advantages of wet etching were also proved. After the fabrication and measurement, a wide frequency band gap is observed and the EBG characteristic is proved. Compared with dry etching, wet etched structure turns out a deeper stopband and a wider bandwidth. While the 50Ω metal trace and ground remaining intact, the substrate-defected structure can be combined with traditional EBG structures to get devices with better performance.