光学学报, 2016, 36 (2): 0212002, 网络出版: 2016-01-25   

大口径反射镜组件面形检测系统及方法研究

Research on Surface Measure Device for Process of Large Aperture Mirror Assembly
作者单位
中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
摘要
大口径反射镜组件检测存在的设备昂贵、环境要求苛刻等问题。基于S-H波前传感器的子孔径拼接检测技术,对其拼接算法进行改进,提出混联拼接算法,有效减小拼接导致的面形检测误差。该方法结合自准直波前检测系统和高精密二维扫描系统形成大口径反射镜反射面形拼接检测系统。对比实验表明,该系统测量误差为0.072 λ,满足高功率固体激光器对大口径反射镜组件装校过程面形控制的要求。
Abstract
Surface shape measure of large aperture mirror components existing problems of high cost and strict environmental requirements. In this paper, based on the sub aperture stitching detection technology of S-H wavefront sensor, the stitching algorithm is improved, and the mixed stitching algorithm is proposed, which can effectively reduce the error caused by the sub-aperture stitching. With auto-collimation wave-front detection system and high precision two-dimensional scanning system, the reflective surface shape of large aperture reflector is detected by surface stitching. The experimental results show that the measurement error of the device is approximately 0.072 λ, which meets the requirements of the process of the large aperture mirror assembly from the high power solid laser.

陈海平, 熊召, 曹庭分, 叶海仙, 刘长春, 袁晓东, 周海. 大口径反射镜组件面形检测系统及方法研究[J]. 光学学报, 2016, 36(2): 0212002. Chen Haiping, Xiong Zhao, Cao Tingfen, Ye Haixian, Liu Changchu, Yuan Xiaodong, Zhou Hai. Research on Surface Measure Device for Process of Large Aperture Mirror Assembly[J]. Acta Optica Sinica, 2016, 36(2): 0212002.

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