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大口径反射镜组件面形检测系统及方法研究

Research on Surface Measure Device for Process of Large Aperture Mirror Assembly

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摘要

大口径反射镜组件检测存在的设备昂贵、环境要求苛刻等问题。基于S-H波前传感器的子孔径拼接检测技术,对其拼接算法进行改进,提出混联拼接算法,有效减小拼接导致的面形检测误差。该方法结合自准直波前检测系统和高精密二维扫描系统形成大口径反射镜反射面形拼接检测系统。对比实验表明,该系统测量误差为0.072 λ,满足高功率固体激光器对大口径反射镜组件装校过程面形控制的要求。

Abstract

Surface shape measure of large aperture mirror components existing problems of high cost and strict environmental requirements. In this paper, based on the sub aperture stitching detection technology of S-H wavefront sensor, the stitching algorithm is improved, and the mixed stitching algorithm is proposed, which can effectively reduce the error caused by the sub-aperture stitching. With auto-collimation wave-front detection system and high precision two-dimensional scanning system, the reflective surface shape of large aperture reflector is detected by surface stitching. The experimental results show that the measurement error of the device is approximately 0.072 λ, which meets the requirements of the process of the large aperture mirror assembly from the high power solid laser.

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中图分类号:TH741

DOI:10.3788/aos201636.0212002

所属栏目:仪器,测量与计量

收稿日期:2015-09-09

修改稿日期:2015-09-20

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作者单位    点击查看

陈海平:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
熊召:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
曹庭分:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
叶海仙:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
刘长春:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
袁晓东:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
周海:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900

联系人作者:陈海平(chping5705@163.com)

备注:陈海平(1988—),男,硕士,助理研究员,主要从事测试计量技术方面的研究。

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引用该论文

Chen Haiping,Xiong Zhao,Cao Tingfen,Ye Haixian,Liu Changchu,Yuan Xiaodong,Zhou Hai. Research on Surface Measure Device for Process of Large Aperture Mirror Assembly[J]. Acta Optica Sinica, 2016, 36(2): 0212002

陈海平,熊召,曹庭分,叶海仙,刘长春,袁晓东,周海. 大口径反射镜组件面形检测系统及方法研究[J]. 光学学报, 2016, 36(2): 0212002

被引情况

【1】张敏,高松涛,苗二龙,隋永新,杨怀江. 最大似然估计法去除子孔径拼接检测中的支撑误差. 激光与光电子学进展, 2017, 54(4): 41204--1

【2】巫玲,陈念年,范勇,叶一东. 相对角差法重建大口径平面光学元件面形. 光学学报, 2019, 39(6): 623002--1

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