光学学报, 2016, 36 (3): 0306002, 网络出版: 2016-01-25
波纹膜片式光纤法布里-珀罗压力传感器
Optical Fiber Fabry-Perot Pressure Sensor Using Corrugated Diaphragm
光纤光学 光纤传感器 微压 法布里-珀罗 波纹膜片 fiber optics optical fiber sensor micro-pressure Fabry-Perot corrugated diaphragm
摘要
设计并研制了一种新型的波纹膜片式光纤法布里-珀罗压力传感器,运用仿真软件对波纹膜片进行膜片参数的优化,完成了波纹膜片式法布里-珀罗压力传感器的结构设计与制备,同时用搭建的微压传感器测试系统对压力传感器进行了测试。实验结果表明,本传感器在0~0.1 MPa的压力范围内,线性度好,重复性好,灵敏度高。
Abstract
A novel optical fiber Fabry- Perot pressure sensor using a corrugated diaphragm is presented. The mechanical model of corrugated diaphragm is analyzed and the parameters are optimized by simulation. The structures of the sensor and the production methods are elaborated. Pressure tests are carried out by employing the micro-pressure sensor testing system. Experimental results demonstrate that the sensor has reasonable linearity, sensitivity and repeatability in the range of 0 to 0.1 MPa.
陈露, 朱佳利, 李泽焱, 王鸣. 波纹膜片式光纤法布里-珀罗压力传感器[J]. 光学学报, 2016, 36(3): 0306002. Chen Lu, Zhu Jiali, Li Zeyan, Wang Ming. Optical Fiber Fabry-Perot Pressure Sensor Using Corrugated Diaphragm[J]. Acta Optica Sinica, 2016, 36(3): 0306002.