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光学薄膜参数测量方法研究

Study on optical thin film parameters measurement method

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摘要

为了研究准确性和效率更高的膜层光学薄膜参数测量方法,对优化膜系结构和改进制备工艺都有重要的指导作用。论文在研究传统测量方法基础上,将包络线法与全光谱拟合反演法相结合,提出了一种新型的光学薄膜参数测量方法。该方法将采用包络线法计算的单层膜光学薄膜参数近似值作为参考,设置全光谱拟合反演法优化搜索的上下限,结合适当的评价函数构建计算物理模型,并选用综合优化算法求解获得待测膜系各膜层的光学薄膜参数。最后设计TiO2、SiO2单层膜和膜系为:G|0.5HLHL0.5H|A(H-TiO2,L-SiO2)的多层膜进行测量验证,并分析了该测量方法的效率、准确度、稳定性等。

Abstract

Studying more precise and efficient measuring-method for determining optical parameters of thin films plays a guiding role in improving design and optimizing preparation process of optical thin films. Several traditional measuring-methods were introduced briefly in this paper, and a new measuring-method was deduced combined envelope with the full spectrum inversion method fitting. In this method, optical parameters of a single layer were calculated approximately with envelope method, and according to the results, the upper and lower limits of the optical parameters were estimated for the full spectrum inversion method fitting firstly. Then, the physical model of the new method was established. After that, the optical parameters of thin films were solved by choosing a comprehensive optimization algorithm. Finally, the validity of the new method was validated through measuring of TiO2、SiO2 single-layer and G|0.5HLHL0.5H|A(H-TiO2,L-SiO2) multilayer. Besides, the measurement accuracy, efficiency and stability of the new method were also analyzed.

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中图分类号:O484

所属栏目:光电测量

收稿日期:2014-07-05

修改稿日期:2014-08-03

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作者单位    点击查看

李凯朋:兰州空间技术物理研究所表面工程技术重点实验室,甘肃 兰州 730000
王多书:兰州空间技术物理研究所表面工程技术重点实验室,甘肃 兰州 730000
李晨:兰州空间技术物理研究所表面工程技术重点实验室,甘肃 兰州 730000
王济州:兰州空间技术物理研究所表面工程技术重点实验室,甘肃 兰州 730000
董茂进:兰州空间技术物理研究所表面工程技术重点实验室,甘肃 兰州 730000
张玲:兰州空间技术物理研究所表面工程技术重点实验室,甘肃 兰州 730000

联系人作者:李凯朋(13259756785@163.com)

备注:李凯朋(1988-),男,硕士生,主要从事光学薄膜参数反演计算方面的研究。

【1】Ulrich R, Torge R.Measurement of thin film parameters with a prism coupler[J]. Applied Optics, 1973, 12(12):2901-2980.

【2】Bhattacharyya D, Sahoo N K, Thakur S, et al. Spectroscopic ellipsometry of TiO2 layers prepared by ion-assisted electron-beam evaporation[J]. Thin Solid Films(S0040-6090), 2000, 360(1/2): 96-102.

【3】Ji Yiqin, Liu Huasong, Zhang Yanmin. Test and analysis of optical film constants[J]. Infrared and Laser Engineering, 2006, 35(5): 513-518. (in Chinese)

【4】Chen Yanping, Yu Feihong. Test methods for film thickness and optical constants[J]. Optical Instruments, 2006, 28(6): 84-88. (in Chinese)

【5】Xie Yi, Chen Qian, Liu Yong. Determination of the optical constants and thickness of thin film by improved flexible tolerance method[J]. Infrared and Laser Engineering, 2007, 36(4): 521-525. (in Chinese)

【6】Dirk Perlman, Philippe Frederic Smet. Methods for the determination of the optical constants of thin films from single transmission measurements: a critical review [J]. Appl Phys, 2003, 3(6): 1850-1857.

【7】Yao Xilin, Tong Nanchun, Xiong Changxin. New methods for determining optical constants of thin films from single measurements[J]. Optical Design and Testing II, 2005, 5638(140): 1088 -1099. (in Chinese)

【8】Zhou Tianyu, Yang Kaiyong, Wu Suyong. Determination of optical constants and thicknesses of high-reflection multilayer system[J]. Journal of Applied Optics, 2011, 32(1): 128-132. (in Chinese)

【9】Wu Xianquan, Hua Wenshen, Xie Dabin, et al. Inversions of thickness and optical constants of thin film based on improved genetic algorithm[J]. Optical Instruments, 2010, 32(3): 86-90.(in Chinese)

【10】Jing Longkang, Jiang Yurong, Ni Ting. Application of adaptive simulated annealing genetic algorithm in inverse of optical constants and thickness of the thin film[J]. Optical Technique, 2012, 38(2): 218-222. (in Chinese)

引用该论文

Li Kaipeng,Wang Duoshu,Li Chen,Wang Jizhou,Dong Maojin,Zhang Ling. Study on optical thin film parameters measurement method[J]. Infrared and Laser Engineering, 2015, 44(3): 1048-1052

李凯朋,王多书,李晨,王济州,董茂进,张玲. 光学薄膜参数测量方法研究[J]. 红外与激光工程, 2015, 44(3): 1048-1052

被引情况

【1】程勇,陆益敏,郭延龙,黄国俊,王淑云,刘旭,曹海源,初华,杨雪. PLD法制备半球面均匀DLC膜的装置、仿真与实验. 红外与激光工程, 2016, 45(6): 621004--1

【2】庄秋慧,刘国军,付秀华,马孜,王三强. 用于355 nm紫外激光器的消偏振二向色镜. 光子学报, 2016, 45(7): 70731001--1

【3】侯典心,路远,宋福印. 基于全光谱拟合法的VO2薄膜光学常数计算. 红外技术, 2017, 39(3): 243-249

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