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单幅干涉条纹图的高精度波面重建技术

High precision wavefront reconstruction technology for single interferogram

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摘要

结合莫尔条纹、傅里叶变换和数字相移技术实现了对单幅干涉条纹图的高精度相位计算和波面重建。首先,用计算机生成与被处理干涉条纹频率相近的数字相移条纹图,与实际干涉条纹图叠加得到相移莫尔条纹图;然后,利用傅里叶变换、双频滤波、傅里叶反变换和相移技术得到干涉条纹图的相位数据;最后利用波面拟合技术重构原干涉条纹图对应的波面形状。研究结果表明,该技术不仅消除了干涉仪硬件相移产生的非线性误差和滤波时的频谱移中误差,高精度获得了单幅干涉条纹图对应的波前,而且简化了系统的机械结构。同时,对环境的要求明显降低,特别适用于生产现场的检测。

Abstract

Moiré fringe, Fourier transform and digital phase shifting techniques are combined together to realize high precision phase calculation and wavefront reconstruction for the single interferogram. First, four digital phase shifting fringes, which the frequency is similar with the original fringe tested, were generated by computer, and phase shifting Moiré fringesare formed by superposition of original and digital fringes. Then, the phase of original interferogram was obtained through Fourier transform, double frequency filtering, inverse Fourier transform and phase shift technology. Finally, the wavefront shape related original interferogram was reconstructed by wavefront fitting. The experimental result shows that this technology not only removes both of nonlinear error from traditional hardware phase shifting and spectral shift error, and get wavefront with high precision for single interferogram, but also simplifies the mechanical structure of system. At the same time, it reduces the demands on the environment, so it is very much suitable to use in work shop.

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中图分类号:TH741

所属栏目:光电测量

基金项目:陕西省科技厅资助项目(2014KW05, 2014JM8333);陕西省教育厅资助项目(12JS048,13JS039)

收稿日期:2014-08-20

修改稿日期:2014-09-25

网络出版日期:--

作者单位    点击查看

田爱玲:西安工业大学 陕西省薄膜与检测技术重点实验室,陕西 西安 710032
刘 婷:西安工业大学 陕西省薄膜与检测技术重点实验室,陕西 西安 710032
刘 剑:西安工业大学 陕西省薄膜与检测技术重点实验室,陕西 西安 710032
刘丙才:西安工业大学 陕西省薄膜与检测技术重点实验室,陕西 西安 710032
王红军:西安工业大学 陕西省薄膜与检测技术重点实验室,陕西 西安 710032

联系人作者:田爱玲(tian21964@sohu.com)

备注:田爱玲(1964-),女,教授,博士生导师,主要从事光学精密测量技术方面的研究。

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引用该论文

Tian Ailing,Liu Ting,Liu Jian,Liu Bingcai,Wang Hongjun. High precision wavefront reconstruction technology for single interferogram[J]. Infrared and Laser Engineering, 2015, 44(4): 1203-1207

田爱玲,刘 婷,刘 剑,刘丙才,王红军. 单幅干涉条纹图的高精度波面重建技术[J]. 红外与激光工程, 2015, 44(4): 1203-1207

被引情况

【1】李博,马锁冬. 使用区域重构技术的路径无关相位解包方法. 红外与激光工程, 2016, 45(2): 229006--1

【2】赵静,林鸿湘,邱棠,陈静芳. 基于马赫曾德干涉光路的光压测量装置设计. 光子学报, 2016, 45(6): 612002--1

【3】叶明哲,王劭溥,胡摇,郝群. 大梯度相位单幅干涉图的解相方法. 中国激光, 2019, 46(5): 504002--1

【4】李泾渭,辛 青,侯昌伦. 通过傅里叶变换测量多表面面形. 光学 精密工程, 2019, 27(6): 1277-1285

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