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横向剪切干涉中非共光路误差的识别与补偿

Compensation and identification of non-common path error in lateral shearing interferometry

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摘要

由于相移式横向剪切干涉不需要标准参考波面,因此它可以缩小干涉腔长、甚至实现绝对的共光路干涉,从而最大程度上降低了空气扰动和振动的影响,但实验室设计的相移式横向剪切干涉测量装置中的分束棱镜、剪切平板和五棱镜的制造误差仍然造成了发生错位的两波面间产生非共光路误差。通过剪切干涉测量装置中调整误差和非共光路误差的对比分析,提出了非共光路误差的计算方法,并在测试结果中进行非共光路误差的补偿。实验结果发现补偿非共光路误差后的面形误差与ZYGO干涉仪的测量结果非常接近。

Abstract

Because standard reference wave-front is not needed in lateral shearing interferometry(LSI), interferometry cavity can be shorten, even absolute common path interferometry could be achieved, and it is immunity to air turbulence and vibration. Therefore, non-common path error between two shearing wave-fronts which come through different cubic prisms, shear plate and pentaprism is not avoided. In this paper, calculation method of non-common path error was proposed by contrast analysis between adjustment error and non-common path error in shearing interferometry, and non-common path error in surface measurement result was compensated. Lastly, experiment results demonstrate the surface result after compensation is in accordance with ZYGO interferometer.

Newport宣传-MKS新实验室计划
补充资料

中图分类号:O436.1

所属栏目:光电测量

基金项目:国家自然科学基金(51275398,51075322);西安工业大学校长基金(XAGDXJJ0903)

收稿日期:2014-12-20

修改稿日期:2015-01-13

网络出版日期:--

作者单位    点击查看

刘丙才:西安交通大学 机械制造系统工程国家重点实验室,陕西 西安 710049西安工业大学 陕西省薄膜技术与光学检测重点实验室,陕西 西安 710032
李 兵:西安交通大学 机械制造系统工程国家重点实验室,陕西 西安 710049
田爱玲:西安工业大学 陕西省薄膜技术与光学检测重点实验室,陕西 西安 710032
高 芬:西安交通大学 机械制造系统工程国家重点实验室,陕西 西安 710049

联系人作者:刘丙才(liubingcai@xatu.edu.cn)

备注:刘丙才(1981-),男,讲师,主要从事光学干涉测量及三维轮廓测量方面的研究。

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引用该论文

Liu Bingcai,Li Bing,Tian Ailing,Gao Fen. Compensation and identification of non-common path error in lateral shearing interferometry[J]. Infrared and Laser Engineering, 2015, 44(8): 2406-2410

刘丙才,李 兵,田爱玲,高 芬. 横向剪切干涉中非共光路误差的识别与补偿[J]. 红外与激光工程, 2015, 44(8): 2406-2410

被引情况

【1】孙沁园,陈 磊,郑东晖,朱文华,张 瑞,丁 煜. 采用短相干光源的动态斐索干涉仪. 红外与激光工程, 2018, 47(2): 220001--1

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