红外与激光工程, 2015, 44 (12): 3678, 网络出版: 2016-01-26   

长条形扫描反射镜的柔性支撑

Long type scanning mirror with flexible supporting
作者单位
中国科学院长春光学精密机械与物理研究所,吉林 长春 130033
摘要
为适应复杂的工作环境,提高反射镜的面形精度,设计了基于柔性支撑的RB-SiC材料长条形扫描反射镜。采用三角形单元和四边形单元相结合的背部开放式结构,对扫描反射镜进行了轻量化设计;通过分析支撑点跨距对反射镜变形的影响,对支撑点位置进行了优化设计;设计了万向柔性支撑的结构形式,消除装调和环境变化产生的残余应力;利用有限单元法建立了扫描反射镜组件的模型,计算后面形精度可达到0.023λ;采用自准值法,利用ZyGo干涉仪对反射镜的面形精度进行了测量,测量结果显示扫描反射镜的面形RMS值达到0.029λ。通过模拟无穷远处动静态目标进行了静动态成像试验,成像质量一致,通过飞行试验对地面目标进行了拍摄,扫描反射镜动态成像稳定,所获得的图像质量良好。
Abstract
A scanning mirror with the material RB-SiC was designed based on the flexible support, which could operate in complex environment and the reflection mirror′s surface precision was enhanced. A lightweight design was conducted on the scanning mirror in the way of combining the triangular elements and quadrilateral elements on the back-open-architecture; The locations of supporting were optimized by analyzing the impaction of supporting span on the deformation of mirror. Meanwhile, the universal-flexible support structure was designed to eliminate stress during alignment process and alteration of environment. The finite element model of the scanning mirror component was established, and the surface precision could be 0.023λ according to the calculation; The mirror′s surface precision was measured by the ZyGo interferometer with the method of autocollimation after calculation, and the RMS was 0.029λ. The static and dynamic imaging tests were compared through the simulation of the infinite distance target, and the results show the image quality meets well. The imaging stability of the scanning mirror performs well after flight test of imaging the target on ground, the result shows that the photograph performs well.

张雷, 丁亚林, 徐正平, 张洪文, 张健, 郭万存. 长条形扫描反射镜的柔性支撑[J]. 红外与激光工程, 2015, 44(12): 3678. Zhang Lei, Ding Yalin, Xu Zhengping, Zhang Hongwen, Zhang Jian, Guo Wancun. Long type scanning mirror with flexible supporting[J]. Infrared and Laser Engineering, 2015, 44(12): 3678.

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