设计并制备了一种太赫兹波段的类电磁诱导透明(EIT)超材料谐振器，用于链霉亲和素-琼脂糖的特异性传感。利用有限差分法设计两个正方形开口谐振环嵌套构成的超材料谐振器实现类EIT 高Q 谐振，并对其传感特性进行了仿真分析。将生物素和十八硫醇固化在制备的超材料表面形成特异性膜对不同浓度链霉亲和素-琼脂糖进行传感实验，利用基于返波振荡器(BWO)的高分辨太赫兹谱进行了谐振特性测量。结果表明设计的类EIT 超材料传感器Q 值为34，灵敏度为24.7 GHz/RIU，链霉亲和素-琼脂糖单位质量浓度变化引起的频移量为0.65 GHz，为太赫兹器件应用于生物化学领域的无标记微量检测提供一定的参考。

A kind of terahertz metamaterial with electromagnetically induced transparency (EIT) like resonance and its application in streptavidin-agarose (SA) specific sensing are demonstrated. Finite element method is used to analyze the high Q EIT-like resonance and its sensing performance. The label-free specific biosensor is composed of metamaterials functionalized by biotins and octadecanthiols for SA biorecognition experiments. The transmission properties are measured by a high-resolution backward-wave oscillator (BWO) spectral system. The results show that the EIT-like resonance of the metamaterial sensor has a high Q factor of 34 and a sensitivity of 24.7 GHz/RIU. Sensitivity of the resonance frequency shift to SA concentration is 0.65 GHz/(mg/mL). The results provide references for applying terahertz devices to label-free biological and chemical sensing.