光学学报, 2016, 36 (3): 0331001, 网络出版: 2016-03-03   

单层柱状结构薄膜体散射的理论研究

Theoretical Research on Volume Scattering of Thin Films with Single-Layer Columnar Structure
作者单位
1 同济大学先进微结构材料教育部重点实验室, 上海 200092
2 光驰科技(上海)有限公司, 上海 201900
摘要
电子束蒸发的单层光学薄膜具有明显的柱状结构,薄膜内部折射率的变化较大,由此引起的体散射现象也较明显。基于一阶电磁微扰理论,建立了单层光学薄膜的体散射理论模型,分析了膜层厚度、入射光偏振态、柱状结构因子、非均质性对体散射的影响。研究了纯柱状结构下,电子束蒸发的单层二氧化铪(HfO2)薄膜体散射的角分布散射值(ARS)随着膜层厚度的变化规律,结果表明纯柱状结构HfO2 薄膜体散射的ARS 量级与表面散射完全非相关模型的ARS值相近,并且在特定的膜厚范围内,体散射的ARS值随着膜厚的增大而增大。对于非均质性薄膜,当非均质性一定时,体散射的ARS值随着膜厚的增大而增大;当膜层厚度一定时,体散射的ARS值随着非均质性绝对值的增大而减小。
Abstract
Single- layer optical film prepared by electron beam evaporation possesses remarkable columnar structure. The variation of its internal film refractive index is large, so the induced volume scattering phenomenon is relatively obvious. Based on the first-order electromagnetic perturbation theory, the volume scattering theory model of single- layer optical film is established. The effects on volume scattering caused by layer thickness, polarization state of incident light, columnar structure factor and inhomogeneity are analyzed. For optical films with pure columnar structure, the variation law between the volume angle resolved scattering (ARS) of single-layer hafnium oxide (HfO2) thin films prepared by electron beam evaporation and the layer thickness is established. The ARS magnitude of volume scattering for pure columnar HfO2 films is similar to that of the completely uncorrelated surface scattering model. Within a certain range of film thickness, the ARS value of volume scattering increases with the increase of film thickness. For inhomogeneous thin films, the ARS value of volume scattering increases with the increase of film thickness when the inhomogeneity is constant. When the layer thickness is constant, the ARS value of volume scattering will decrease the increase of the absolute value of the inhomogeneity.

吴晗, 张锦龙, 李刚正, 孙英会. 单层柱状结构薄膜体散射的理论研究[J]. 光学学报, 2016, 36(3): 0331001. Wu Han, Zhang Jinlong, Li Gangzheng, Sun Yinghui. Theoretical Research on Volume Scattering of Thin Films with Single-Layer Columnar Structure[J]. Acta Optica Sinica, 2016, 36(3): 0331001.

本文已被 2 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!