优异的电学、热学、机械特性和化学稳定性以及独特的一维纳米结构, 使碳纳米管(CNT)成为应用在微纳电子器件中的理想功能材料。与传统电子器件相比, CNT微纳电子器件性能更为优异。本文综述了近年来制备和改进基于CNT的场发射器、晶体管和传感器的研究进展。经过特定方法的组装和处理, 可使CNT场发射器获得低阀值电压、高发射电流和发射电流稳定等优异性能, 使CNT晶体管具有高迁移率、大跨导和大电流开闭比, 可提高各种CNT传感器的灵敏度。

Owing to their excellent electrical, thermal and mechanical properties, chemical stability and unique one-dimensional nanostructure, carbon nanotubes (CNTs) have been ideal functional materials for application in micro and nano electronic devices. Comparing to traditional electronic devices, CNT-based electronic devices have unique properties. In this paper, recent progress on research of producing and improving CNT-based field emitters, transistors and sensors is reviewed. After assembling and processing by certain methods, CNT-based field emitters possess low threshold voltage, high emission current, and stabilized emission current. CNT-based transistors have high mobility, large transconductance and on/off switching ratio. The sensitivity of various CNT-based sensors has been improved.