超薄玻璃热成形技术是目前国际上研制X射线掠入射天文成像望远镜的重要技术之一,超薄玻璃圆柱面镜片面形的高精度检测是实现超薄玻璃热成形的关键。围绕我国高能X射线掠入射天文望远镜研制对高面形精度的超薄玻璃柱面镜的需求,采用勒让德多项式对柱面镜面形的测量数据进行拟合,利用勒让德多项式各项系数与特定的几何像差的对应性,通过拟合勒让德多项式各项的系数,获得了待测柱面镜面形的特定几何像差,为全面评价柱面镜面形质量提供了参考。

The nominally cylindrical glass segments are forced to a conical form during the assembly process of an X-ray imaging telescope as the ultra-thin glass thermal slumping technique being fully successful. The surface should be measured in order to make high-quality glass with cylindrical surface. Each coefficient of the Legendre polynomials corresponds to the specific geometrical aberration. In this paper, figure error of cylindrical lens is obtained based on the fitting coefficients of Legendre polynomials, which provides an exact method for cylindrical lens surface measurement.