通过非接触式的光学检测方法对两平面间的平行度进行检测。若两平面平行,则两光斑完全重叠在一起;若两光斑没有完全重叠,说明两平面间有倾角。针对两光斑没有重叠的情况,通过理论分析两光斑圆心之间的距离与倾角之间的关系及两光斑间的相对位置与倾角的方向间的关系,然后图像处理实验图得出两光斑间的圆心距,即可确定两端面间倾角的大小及方向,通过圆心测距法求得的倾角误差小于2′。

A non-contact optical detection of parallelism is detected between the two planes. If two planes are parallel, the two spots are completely overlapped. If the two spots are not completely overlapped, it indicates that there is inclination between the two planes. In the case that two spots are overlapped, the distance of the center to the two spots and the relationship between the two spots position and the inclination direction are analyzed. Then we investigate the distance between the two spots by image processing of the experimental photos to determine the magnitude and direction of the inclination of the two surfaces. The inclination error of center distance is less than 2′.