光学与光电技术, 2016, 14 (1): 56, 网络出版: 2016-03-28
离轴二次非球面反射镜几何参数的高精度测量
High-Precision Measurement of the Geometrical Paramenters of Conic Off-Axis Aspheric Mirrors
离轴二次非球面 几何参数 激光干涉仪 激光跟踪仪 conic off-axis aspheric mirrors geometrical parameters laser interferometer laser tracker
摘要
为了实现离轴二次非球面反射镜几何参数的高精度测量,提出了一种激光干涉仪和激光跟踪仪相结合的测量方法。在离轴二次非球面反射镜的无像差点法干涉检测光路的基础上,使用激光跟踪仪的反射球标定离轴二次非球面镜的特征点位置和曲面的空间位置,通过简单计算得到反射面的几何参数。实验中对一离轴凹椭球反射镜进行测量,其二次曲面系数k和曲率c的测量精度分别达到了0.000 1和0.000 000 2。结果表明这种测量方法用于离轴二次非球面反射镜几何参数的高精度测量是合理可行的。
Abstract
In order to achieve high-precision measurement of the geometrical parameters of conic off-axis aspheric mirrors, a method combined with laser interferometer and laser tracker is proposed in the article. Based on the interferometric path of aberration-free point test, the feature pointss position and the surfaces spatical location of conic off-axis aspheric mirrors are measured by the laser tracker balls, and the geometrical parameters are got through simple calculation. An off-axis concave ellipsoidal mirror is tested in the experiment, and the measurement accuracy of conic constant k and curvature c are 0.000 1 and 0.000 000 2. The experimental result shows that the method is successful and effective to measure the geometrical parameters of conic off-axis aspheric mirrors accurately.
黄阳, 王春雨, 李晓轩. 离轴二次非球面反射镜几何参数的高精度测量[J]. 光学与光电技术, 2016, 14(1): 56. HUANG Yang, WANG Chun-yu, LI Xiao-xuan. High-Precision Measurement of the Geometrical Paramenters of Conic Off-Axis Aspheric Mirrors[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2016, 14(1): 56.