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点光源下的Talbot 效应在阴影叠栅中的应用

Shadow Moiré Using Talbot Effect Under Point Light Illumination

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摘要

传统的阴影叠栅轮廓术的测量深度十分有限。根据点光源照明下Talbot自成像的空间分布规律,提出将点光源下的Talbot效应应用于阴影叠栅三维轮廓测量的方法。推导点光源模型下阴影叠栅测量系统中相机接收到的光强随物体到光栅距离变化的数学表达式。数值模拟和实验表明,相对于传统的阴影叠栅轮廓术,利用Talbot效应会大大增加阴影叠栅轮廓术的测量深度。分别使用文中所提出的方法和传统的阴影叠栅轮廓术对同一物体表面进行测量,两次测量结果之差在±5 μm 内。说明将点光源下的Talbot效应应用于阴影叠栅轮廓测量能够准确地反映物体表面的三维形貌。

Abstract

The measurement depth of traditional shadow Moiré profilometry is very limited. According to the space distribution of Talbot self-imaging under the illumination of point light source, a new technique using Talbot effect under point light illumination for shadow Moiré profilometry is proposed. An exact mathematical formula describing the relationship between the intensity of shadow Moiré fringes under the point light illumination and the distance between measured object and gratings is derived. The numerical simulation and experiment show that the measurement depth of the shadow Moiré profilometry is increased notably by using the Talbot effect compared with the traditional shadow Moiré profilometry. Respectively, the proposed method and the traditional shadow Moiré method are used to measure the surface of the same object, the difference of the results obtained by the two methods is within ±5 μm. Thus the validity of the proposed technique is proved. The proposed method can reflect the threedimensional morphology of object surface accurately.

Newport宣传-MKS新实验室计划
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中图分类号:O439

DOI:10.3788/aos201636.0412003

所属栏目:仪器,测量与计量

责任编辑:张雁  信息反馈

基金项目:国家自然科学基金(51105301)、国家973 计划(2015CB057402)、陕西省自然科学基础研究计划(2015JM5190)

收稿日期:2015-10-21

修改稿日期:2015-12-14

网络出版日期:--

作者单位    点击查看

艾永旭:西安交通大学机械制造系统工程国家重点实验室, 陕西 西安 710049
周翔:西安交通大学机械制造系统工程国家重点实验室, 陕西 西安 710049西安交通大学馥莉食品装备工程与科学学院, 陕西 西安 710049
杜虎兵:西安工业大学机电工程学院, 陕西 西安 710021
郭家玉:西安交通大学机械制造系统工程国家重点实验室, 陕西 西安 710049
杨涛:西安交通大学机械制造系统工程国家重点实验室, 陕西 西安 710049
赵磊:西安交通大学机械制造系统工程国家重点实验室, 陕西 西安 710049

联系人作者:艾永旭(1228743074@qq.com)

备注:艾永旭(1993—),男,硕士研究生,主要从事光学三维测量方面的研究。

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引用该论文

Ai Yongxu,Zhou Xiang,Du Hubing,Guo Jiayu,Yang Tao,Zhao Lei. Shadow Moiré Using Talbot Effect Under Point Light Illumination[J]. Acta Optica Sinica, 2016, 36(4): 0412003

艾永旭,周翔,杜虎兵,郭家玉,杨涛,赵磊. 点光源下的Talbot 效应在阴影叠栅中的应用[J]. 光学学报, 2016, 36(4): 0412003

被引情况

【1】杜虎兵,艾永旭. 基于正则化主量分析的相移阴影叠栅解调技术. 激光与光电子学进展, 2016, 53(10): 100501--1

【2】艾永旭,周翔,杜虎兵,郭家玉,费梓轩,李东. 一种多距离融合的大深度测量范围相移阴影叠栅轮廓术. 光学学报, 2016, 36(12): 1212001--1

【3】颜菁菁,杜虎兵. 相移阴影叠栅实时标定技术. 激光与光电子学进展, 2017, 54(9): 91202--1

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