微光机电系统（MOEMS）微镜在激光显示、光束扫描、自适应光学等领域都有重要应用。现有的MOEMS微镜驱动器一般为静电吸引型, 难以克服其吸合效应造成的各种问题, 同时, 方形的驱动器难以与圆形的镜面形成良好匹配, 填充比较低。提出了一种环形静电排斥驱动器的MOEMS微镜, 该静电排斥驱动器以环形排列, 并围绕在镜面的周围, 达到了与圆形镜面的良好匹配。所设计的微镜口径为204 μm, 并利用PolyMUMPS表面工艺进行加工。模拟仿真及实验测试结果显示, 该微镜具有0.62°的最大旋转角, 494 μs的响应时间和1.191 kHz的工作带宽, 适用于一般光束扫描等的应用需求。

The micro-opto-electro-mechanical systems (MOEMS) mirror is an important optical device in laser display, light beam scanning, and adaptive optics applications. MOEMS mirrors are mostly attractive electrostatically actuated in the reported literatures, which are troubled by the pull-in effect. Additionally, the mismatch of square actuators and circular mirror will make the fill factor much lower. A MOEMS mirror based on electrostatic repulsive circular actuator and surface fabrication process is proposed in this paper. Arranged like a ring around, the actuator matches well with the circular mirror. The designed MOEMS mirror has an aperture of 204 μm, and is fabricated by polycrystalline silicon multi-users-MEMS-processes (PolyMUMPs) process. Simulation and experimental results show that the mirror has a maximum rotation angle of 0.62°, a response time of 494 μs and an operation bandwidth of 1.191 kHz, and is suitable for the common beam scanning applications.