近年来, 随着微光机电系统(MOEMS) 技术的快速发展, 光谱仪朝着微型化、低成本、高性能方向发展。基于MOEMS技术制作的闪耀光栅可集成于扫描微镜, 其作为近红外光谱仪的核心部件, 可实现单管探测器代替昂贵的阵列式探测器, 以降低近红外光谱仪成本与体积。设计了一种高性能扫描光栅微镜, 以提高光谱仪的探测灵敏度。扫描微镜表面集成高衍射效率光栅, 背面制作电磁驱动线圈。采用光学软件与有限元方法对器件参数进行优化。仿真结果表明: 扫描光栅微镜谐振频率为484.38 Hz, 最大扭转角度为±4.55°, 在800~1800 nm工作波长范围内, 整体动态衍射效率在54%以上且最大值达90%。

In the last few years, with the rapid development of micro-opto-electro-mechanical-systems(MOEMS), near-infrared(NIR) spectrometers are moving towards low cost, high performance and miniaturization. As a key component of NIR micro-spectrometers, the scanning grating mirror has an imponderable advantage on diffraction efficiency compared to other grating mirrors, which makes it feasible to develop high optical detecting sensitivity systems with one single photodiode. In order to improve the detecting performance of NIR spectrometers, a single silicon MOEMS scanning grating mirror has been designed, which integrates a high diffraction efficiency blazed grating on the top and an electromagnetic actuator on the bottom. Based on a tilted (111) silicon substrate, the scanning grating mirror structure can be easily fabricated by micromachining technology. Meanwhile, a simulation has also been carried out by optical software and finite element analysis(FEA), and the results show that the dynamic diffraction efficiency is more than 54% and the peak value reaches 90% in the spectrum range of 800-1800 nm, meanwhile the maximum torsion angle of MOMES scanning grating mirror is ±4.55° at the frequency of 484.38 Hz.