谐振式压力微传感器因其高精度、高稳定性及准数字输出等特性而广泛应用于气压监测、航空航天等领域。相较于其他结构, 差分谐振式具有灵敏度高、线性度好及温度漂移小等优势。然而, 要获得差分谐振式压力微传感器的最优性能, 仍需解决差分谐振梁灵敏度不匹配的问题。在仿真与实验的基础上, 对差分谐振式压力微传感器的灵敏度匹配特性进行了相关研究。根据研究结果, 对传感器的结构参数进行了优化设计。两谐振梁的设计灵敏度为±46 Hz/kP, 实验结果显示中心梁的实际灵敏度为45 Hz/kPa, 边梁的实际灵敏度为-44 Hz/kPa, 差分输出的线性度高达0.999 999 9。

Resonant pressure micro sensors with differential design can achieve high linearity and sensitivity, and reduce the temperature drift. However, the reported differential resonant pressure micro sensors suffer from sensitivity mismatch among two resonant beams, leading to compromised performance. This problem is resulted from the undesirable choice of relative position of two resonant beams based on numerical simulations, which does not agree with experimental results. To address this issue, this paper presents a differential resonant pressure micro sensor with the sensitivity of two resonant beams fine-tuned. Based on numerical simulations, the sensitivity of the two resonant beams is designed as ±46 Hz/kPa while the experimental results are 45 Hz/kPa for the central beam and -44 Hz/kPa for the side beam.