采用限位块可以提高MEMS器件的抗冲击性能, 但由于冲击环境中MEMS结构与限位块的碰撞过程可能产生较大的瞬间冲击以致器件失效, 用弹性限位块可以有效解决上述问题, 但是其防护效果会受到限位参数的影响。为了得到限位块最佳设计参数, 首先建立了MEMS器件的冲击动力学模型, 提取了影响MEMS器件冲击响应的因素, 进而分析了限位块弹性系数、限位距对冲击响应的影响; 最后提出了限位块的设计方法并给出了最终设计结果。结果表明: 设计弹性限位块需要兼顾限位效果和缓冲性能, 同时减小限位距也可显著提高微器件抗冲击性能。

stopper can be used for shock protection, however, traditional stopper may generate secondary shock which could result in fracture, debris, and performance shifts of the device. The problem can be efficiently solved by introducing elastic stopper, but its protective effect is greatly influenced by stopper’s parameters. In order to get the best parameter, impact dynamic model of MEMS is established at first, based on which the factors affecting shock response are extracted. Then the parameters of elastic stopper, including elastic coefficient and limit distance are emphatically analyzed, the method of designing elastic stopper and final result are finally provided. Results show that: effective shock protection must minimize the motion of microstructure as well as maximize buffer performance. Besides, minimizing limit distance is also helpful to improve anti-shock ability.