Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator-corrigendum

Jun Cheng; Duk-Yong Choi

doi:doi:10.3788/col201614.043501

Chinese Optics Letters, 2016, 14 (4): 043501, Published Online: Apr. 12, 2016

Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator-corrigendum

Jun Cheng ¹Duk-Yong Choi ²

Author Affiliations

¹ School of Electromechanical Engineering, Beijing Institute of Technology, Beijing1 00081 , China

² Centre for Ultrahigh bandwidth Devices for Optical Systems, Laser Physics Centre, Research School of Physics and Engineering, The Australian National University, Canberra, ACT2 601, Australia

Abstract

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Jun Cheng, Duk-Yong Choi. Three-step lithography to the fabrication of vertically coupled micro-ring resonators in amorphous silicon-on-insulator-corrigendum[J]. Chinese Optics Letters, 2016, 14(4): 043501.