为了得到相变温度低且性能优越的智能窗光学材料,基于时域有限差分法模拟计算了不同结构的VO2纳米周期点阵相变前后的光学特性,优选出最佳的VO2纳米周期点阵结构.采用直流磁控溅射和后退火工艺在玻璃衬底上制备VO2薄膜,再利用掩膜光刻的方法制备VO2纳米周期点阵结构,测试其组分结构,反射和透过率曲线.结果表明,填充比为0.74的圆形纳米周期点阵的相变温度有效降低了约25 ℃,在波长为1700 nm处的透过率改变量达到39 %,透过率整体高于VO2薄膜,呈现出良好的相变光学特性,说明通过调控VO2纳米周期点阵的结构可以有效提升材料的光学特性.

The optical properties of VO2 nano periodic array were studied in order to obtain low phase transition temperature and high quality optical material widely used in the field of intelligent window. Optical properties of VO2 nano periodic array at different filling ratios were calculated with finite difference time domain method, and the best VO2 nano periodic array was selected. Vanadium film was deposited on the glass substrate by magnetic DC sputtering, then VO2 film was formed by annealing under air condition, and VO2 nano periodic array was gained by photolithography and etching technology. Its microstructure and optical properties were tested by SEM, XRD and XPS as well as spectrophotometer. The results show that the phase transition temperature of VO2 nano periodic array with filling ratio 0.74 decrease about 25 ℃ and the transmittance has changed 39% between the metallic and semiconducting states at 1700 nm.VO2 nano periodic array exhibits the better optical properties than VO2 film before and after phase transition. It is indicated that the optical properties can be improved through regulating the structure of VO2 nano periodic array.