红外与激光工程, 2016, 45 (5): 0522003, 网络出版: 2016-06-12   

表面粗糙度激光散射检测的多波长光纤传感器

Multi-wavelength fiber sensor for measuring surface roughness based on laser scattering
作者单位
烟台大学 光电信息科学技术学院, 山东 烟台 264005
摘要
材料表面的散射特性和表面粗糙度对产品的性能有十分重要的影响, 基于激光散射原理设计了用于检测表面粗糙度和表面散射特性的多波长光纤传感器。光纤传感器的探头采用特殊的几何设计, 用650 nm、1 310 nm和1 550 nm激光作为光源, 选择2 mm的工作距离作为最佳测量距离, 对不同表面粗糙度的样品进行了测试和分析。实验结果表明: 同一波长下, 随着表面粗糙度的增大, 以外磨样品为反射面测得的反射强度减小;同一粗糙度下, 入射波长越长, 反射强度越大。多波长光纤传感器可以精确地测量表面粗糙度, 并能有效地减小系统误差。系统误差分析得到传感器的相对误差范围大约为3.56%~7.43%。
Abstract
Scattering characteristics and surface roughness on the surface of the materials make a very important influence on the performance of the product. The multi-wavelength fiber sensor for measuring surface roughness and surface scattering characteristics based on laser scattering was investigated. The special geometric design was used by the probe of fiber optic sensor, specimens with different surface roughness were analyzed by using 650 nm, 1 310 nm and 1 550 nm laser as the light source, respectively. The working distance of 2 mm was chosen as the optimum measurement distance. The experimental results indicate that under the same wavelength, the reflection intensity measured from the reflective surface of grinding samples decrease with the increase of surface roughness. Under the same roughness, the incident wavelength is longer, the reflection intensity is bigger. The multi-wavelength fiber sensor can accurately measure surface roughness, and can effectively reduce the system error. The range of relative error of fiber sensor by analyzing system error is about 3.56%-7.43%.

朱南南, 张骏. 表面粗糙度激光散射检测的多波长光纤传感器[J]. 红外与激光工程, 2016, 45(5): 0522003. Zhu Nannan, Zhang Jun. Multi-wavelength fiber sensor for measuring surface roughness based on laser scattering[J]. Infrared and Laser Engineering, 2016, 45(5): 0522003.

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