利用锆钛酸铅(PZT)的逆压电效应, 设计并制备了膜片式压电微泵。 通过将电能转换为机械能, 实现了液体的微流体控制。微泵由微驱动器与单向微阀两部分组成; 微驱动器主要为液体流动提供驱动力, 单向微阀则用于精确控制液体的流动方向。通过对PZT-Si膜片的位移量、位移形状的仿真分析, 确定了微驱动器的设计尺寸, 并估算其液体驱动性能。利用共晶键合工艺、研磨减薄工艺、硅深反应离子刻蚀工艺和准分子激光加工工艺等制备出了微驱动器和单向微阀。最后, 设计了驱动测试实验, 检测了微泵的液体驱动性能。测试结果表明: 所制备的膜片式压电微泵驱动的谐振频率约为70 kHz, 能驱动微米量级的液体位移或运动。当微泵驱动电压为30 Vp-p、频率为600 Hz时, 液体的驱动流速约为65 μL/min。该微泵具有体积小, 线性度好等特点。

On the basis of the inverse piezoelectric effect of the PZT(Pb based Lanthanum doped Zirconate Titanate), a micro diaphragm piezoelectric pump was designed and fabricated. By converting the electrical energy into mechanical energy, the microfluidic control of liquid was realized. The micro pump was consisted of two parts, a micro actuator and a micro check valve. The micro actuator was mainly used to provide a driving force for the liquid, and the micro check valve was taken to control the flow direction of the liquid precisely. With the simulation analysis of the displacement and shape of the PZT-Si diaphragm, the design size of micro actuator was determined and the driving liquid performance of the actuator was estimated. By using eutectic bonding, grinding thinning, ICP-RIE(Inductively Coupled Plasma-Reactive Ion Etching), excimer laser processing and other micro fabrication processes, the micro actuator and the micro check valve were fabricated, respectively. A driven testing of the micro pump was carried out. The experimental results show that the resonance frequency is about 70 kHz, which can drive the displacement and movement of liquid with a micrometer volume. When the driving signal is 30 Vp-p at the frequency of 600 Hz, the drive flow rate of liquid is about 65 μL/min. The fabricated micro pump is characterized by a small volume and good linearity.