太赫兹科学与电子信息学报, 2016, 14 (3): 467, 网络出版: 2016-07-26  

声表面波滤波器理论研究进展

Research progress on the theory of Surface Acoustic Wave filters
作者单位
中国工程物理研究院 电子工程研究所, 四川 绵阳 621999
摘要
为使声表面波(SAW)滤波器技术向更高的频段发展, 对SAW滤波器的基础理论进行了分析:展示了压电材料压电效应(逆压电效应)的产生机理, 并通过例子对比说明压电材料的晶体结构属性。介绍了重要的物理量机电耦合系数以及SAW传播的物理机理;重点推导了SAW在压电介质中的传播性质, 并同非压电介质的传播特性进行了对比。得出SAW在压电介质中是非色散波, 存在3个方向的质点位移分量;压电薄膜中SAW是色散波, 且压电薄膜使得声表面波速度发生变化。
Abstract
In order to extend the frequency of Surface Acoustic Wave(SAW) filters to a higher band, the principles of SAW filters are analyzed. At first, piezoelectricity and ob-piezoelectricity of piezoelectric film are presented. Then the performances of crystal structure of piezoelectric material are compared among different examples. The electro-mechanical coupling coefficients of important physical quantities are introduced as well as the physical mechanism of SAW transmission. Then the transmission properties of SAW in the piezoelectric material and piezoelectric film are studied in detail. And the transmission properties of SAW in piezoelectric medium and in ob-piezoelectric medium are contrasted. The results indicate that SAW is non-dispersive wave in the piezoelectric material with three directions of particle displacement vectors; while in the piezoelectric film, SAW is dispersive wave, and the piezoelectric film would influence the velocity of SAW.

陈颖慧, 张慧, 郑英彬. 声表面波滤波器理论研究进展[J]. 太赫兹科学与电子信息学报, 2016, 14(3): 467. CHEN Yinghui, ZHANG Hui, ZHENG Yingbin. Research progress on the theory of Surface Acoustic Wave filters[J]. Journal of terahertz science and electronic information technology, 2016, 14(3): 467.

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