提出一种基于激光间接冲击技术高效、高精度地制造微零件的新方法,采用激光冲击聚合物间接加载机制，结合不同形状的微模具，使用NdYAG-GAIA R 激光器在厚度为35 μm的钛板上实现了在单脉冲激光冲击作用下制造精密金属微零件。使用KEYENCE VHX-1000C超景深三维显微系统对成形的微零件进行观测，发现在合适的激光能量范围内，成形的微零件表面轮廓质量较好，且微零件的成形深度与微模具的凹坑深度基本一致。使用有限元分析方法对微零件的成形过程以及成形零件厚度的减薄率进行了数值模拟分析。从实验和模拟的结果可以看出，该成形方法可以在激光单次冲击作用下成形质量良好的微零件。

One new method based on laser indirect shocking is proposed to manufacture microparts with high efficiency and high precision. Based on the indirect loading mechanism of laser shocking polymers, with different shapes of micromolds and NdYAG-GAIA R laser, it is realized to manufacture microparts on a 35 μm thick Ti sheet under only single laser impact. The experimentally obtained microparts are investigated by the digital measurement system (KEYENCE VHX-1000C), and it is found that within the suitable range of laser power, the microparts have good surface profile, and their forming depth are basically consistent with the pit depth of micromolds. Besides, the forming process of microparts and the thinning rate of the formed parts are investigated by the finite element numerical simulation. The experimental and simulation results show that the good quality microparts can be formed under the single laser impact.