利用ICEM软件对简化后的准分子激光器气体流道进行二维截面网格划分。基于realizable k-ε湍流模型和多参考系(MRF)模型，利用FLUENT软件对激光器内部气体流动进行稳态流场仿真，获得了气体流动速度大小和分布。仿真结果表明,气体平均流速与风机转速大小呈线性关系，风机扭矩与风机转速的平方也呈线性关系。采用皮托管实测流速分布并与仿真结果进行对比，它们之间的一致证实了仿真结果的可靠性。

With ICEM software, the mesh generation of the two-dimensional cross-section of the simplified gas flow channel of excimer laser is introduced. Based on realizable k-ε model and multiple reference frame (MRF) model, the simulation to the steady-state flow field of gas flowing inside laser with FLUENT software, and the velocity value and its distribution of gas flow are obtained. The simulation results indicate that there exist linear relationships between the average gas flow velocity and the rotational speed of blowers, also between the torsional moment and the square of rotational speed of blowers. The gas flow velocity distribution measured by a pitot tube is compared with the simulation results, and the consistency between them confirms the validity of the latter.