为了研究化学镀膜过程中本征应力的演变过程, 建立了基于光纤光栅传感的本征应力计算模型, 提出了一种监测化学镀膜过程本征应力演变的方法.通过记录光纤光栅中心波长的偏移量, 结合裸光栅进行补偿, 实现了在线监测化学镀膜过程产生的本征应力.使用光纤光栅传感器对化学镀Cu过程中本征应力进行监测.结果表明：在化学镀Cu过程中, 光纤光栅中心波长蓝移, 本征应力表现为压应力, 且本征应力随时间的增加而增大；监测光栅的压力灵敏度为4.10 pm/MPa, 监测准确度可达到0.24 Mpa.

To study the evolution of the intrinsic stress in chemical plating processes, a method based on optical grating sensing model was presented for online monitoring the intrinsic stress evolution. By recording the centre wavelength shifts of Fiber Bragg Grating (FBG) and combining with a bare grating used for compensation, this method has realized the online monitoring of the intrinsic stress. The copper chemical plating experiment was used as an example for the online monitoring. Results show that, the centre wavelength of monitoring FBG presents a blue shift during the copper chemical plating processes. The intrinsic stress serves as a compressive stress on the FBG, which increases with the increasing of the plating time. The stress sensitivity and the precision of the monitoring FBG is 4.10 pm/MPa and 0.24 Mpa respectively.