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高性能短波红外 InGaAs焦平面探测器研究进展

Developments of High Performance Short-wave Infrared InGaAs Focal Plane Detectors

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摘要

中科院上海技物所近十年来开展了高性能短波红外InGaAs 焦平面探测器的研究。0.9~1.7 ?m近红外InGaAs 焦平面探测器已实现了256×1、512×1、1024×1 等多种线列规格,以及320×256、640×512、4000×128 等面阵,室温暗电流密度<5 nA/cm2,室温峰值探测率优于5×1012 cm?Hz1/2/W。同时,开展了向可见波段拓展的320×256 焦平面探测器研究,光谱范围0.5~1.7 ?m,在0.8 ?m 的量子效率约20%,在1.0 ?m 的量子效率约45%。针对高光谱应用需求,上海技物所开展了1.0~2.5?m 短波红外InGaAs 探测器研究,暗电流密度小于10 nA/cm2@200K,形成了512×256、1024×128等多规格探测器,峰值量子效率高于75%,峰值探测率优于5×1011 cm?Hz1/2/W。

Abstract

High performance SWIR InGaAs FPAs have been studied in Shanghai Institute of Technical Physics(SITP) over the past ten years. Some typical linear 256×1, 512×1, 1024×1 FPAs and 2D format 320×256,640×512, 4000×128 FPAs were obtained with relative spectral response in the range of 0.9 ?m to 1.70 ?m. The dark current density is about 5 nA/cm2 and the peak detectivity is superior to 5×1012 cmHz1/2/W at room temperature. At the same time, 320×256 InGaAs FPAs with response extended to visible wavelength band have been studied and fabricated. The results indicated that the response of the FPAs covered the wavelength band from 0.5 ?m to 1.70 ?m. Quantum efficiency is approximately 20% at 0.8 ?m, and 45% at 1.0 ?m. The extended InGaAs FPAs with the response wavelength from 1.0 ?m to 2.5 ?m were also focused in SITP for hyperspectral applications. The dark current density dropped to about 10 nA/cm2 at 200 K. 2D format 512×256, 1024×128 extended InGaAs FPAs were developed with peak detectivity superior to 5×1012 cmHz1/2/W and quantum efficiency superior to 75%.

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中图分类号:TN215

所属栏目:综述与评论

基金项目:国家重点基础研究发展计划( 2012CB619200),国家自然科学基金( 61376052,61475179)

收稿日期:2016-07-12

修改稿日期:2016-07-29

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邵秀梅:中国科学院上海技术物理研究所传感技术国家重点实验室,上海 200083中国科学院红外成像材料与器件重点实验室,上海 200083
龚海梅:中国科学院上海技术物理研究所传感技术国家重点实验室,上海 200083中国科学院红外成像材料与器件重点实验室,上海 200083
李雪:中国科学院上海技术物理研究所传感技术国家重点实验室,上海 200083中国科学院红外成像材料与器件重点实验室,上海 200083
方家熊:中国科学院上海技术物理研究所传感技术国家重点实验室,上海 200083中国科学院红外成像材料与器件重点实验室,上海 200083
唐恒敬:中国科学院上海技术物理研究所传感技术国家重点实验室,上海 200083中国科学院红外成像材料与器件重点实验室,上海 200083
李淘:中国科学院上海技术物理研究所传感技术国家重点实验室,上海 200083中国科学院红外成像材料与器件重点实验室,上海 200083
黄松垒:中国科学院上海技术物理研究所传感技术国家重点实验室,上海 200083中国科学院红外成像材料与器件重点实验室,上海 200083
黄张成:中国科学院上海技术物理研究所传感技术国家重点实验室,上海 200083中国科学院红外成像材料与器件重点实验室,上海 200083

联系人作者:邵秀梅(shaoxm@mail.sitp.ac.cn)

备注:邵秀梅,( 1978-),女,研究员,博士,主要从事红外探测器研究。

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引用该论文

SHAO Xiumei,GONG Haimei,LI Xue,FANG Jiaxiong,TANG Hengjing,LI Tao,HUANG Songlei,HUANG Zhangchen. Developments of High Performance Short-wave Infrared InGaAs Focal Plane Detectors[J]. Infrared Technology, 2016, 38(8): 629-635

邵秀梅,龚海梅,李雪,方家熊,唐恒敬,李淘,黄松垒,黄张成. 高性能短波红外 InGaAs焦平面探测器研究进展[J]. 红外技术, 2016, 38(8): 629-635

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