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Near-field holography enhanced with antireflection coatings—an improved method for fabricating diffraction gratings

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Abstract

Near-field holography (NFH), with its virtues of precise critical dimensions and high throughput, has a great potential for the realization of soft x-ray diffraction gratings. We show that NFH with reflections reduced by the integration of antireflective coatings (ARCs) simplifies the NFH process relative to that of setups using refractive index liquids. Based on the proposed NFH with ARCs, gold-coated laminar gratings were fabricated using NFH and subsequent ion beam etching. The efficiency angular spectrum shows that the stray light of the gratings is reduced one level of magnitude by the suppression of interface reflections during NFH.

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DOI:10.3788/col201614.090501

所属栏目:Diffraction and gratings

收稿日期:2016-04-20

录用日期:2016-07-08

网络出版日期:2016-08-04

作者单位    点击查看

Yuanfang Li:National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China
Huoyao Chen:National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China
Stefanie Kroker:Institut für Angewandte Physik, Friedrich-Schiller-Universit?t Jena, Max-Wien-Platz 1, Jena 07743, GermanyTechnische Universit?t Braunschweig, Laboratory for Emerging Nanometrology, Pockelsstr. 14, Braunschweig 3 8106, GermanyPhysikalisch-Technische Bundesanstalt, Bundesallee 100, Braunschweig 38116, Germany
Thomas K?sebier:Institut für Angewandte Physik, Friedrich-Schiller-Universit?t Jena, Max-Wien-Platz 1, Jena 07743, Germany
Zhengkun Liu:National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China
Keqiang Qiu:National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China
Ying Liu:National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China
Ernst-Bernhard Kley:Institut für Angewandte Physik, Friedrich-Schiller-Universit?t Jena, Max-Wien-Platz 1, Jena 07743, Germany
Xiangdong Xu:National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China
Yilin Hong:National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China
and Shaojun Fu:National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei 230029, China

联系人作者:联系作者(liuychch@ustc.edu.cn)

备注:This work was supported by the Sino-German Center for Research Promotion (No. GZ 983), the German Science Foundation DFG (No. IRTG 2101), and the Joint Fund of the National Natural Science Foundation of China and the China Academy of Engineering Physics (No. U1230104). We express our gratitude to Dr. Thomas Hegenbart (asphericon GmbH) for his support on the ARC for the grating mask. We thank Yu Wang of the University of Science and Technology of China (USTC) for the establishment of the NFH setup, and Hongjun Zhou, Tonglin Huo, and Xuanzhi Xia of the USTC for efficiency measurements at the National Synchrotron Radiation Laboratory of China.

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引用该论文

Yuanfang Li, Huoyao Chen, Stefanie Kroker, Thomas K?sebier, Zhengkun Liu, Keqiang Qiu, Ying Liu, Ernst-Bernhard Kley, Xiangdong Xu, Yilin Hong, and Shaojun Fu, "Near-field holography enhanced with antireflection coatings—an improved method for fabricating diffraction gratings," Chinese Optics Letters 14(9), 090501 (2016)

被引情况

【1】Wenqiang Hua,Guangzhao Zhou,Yuzhu Wang,Ping Zhou,Shumin Yang,Chuanqian Peng,Fenggang Bian,Xiuhong Li,and Jie Wang. Measurement of the spatial coherence of hard synchrotron radiation using a pencil beam. Chinese Optics Letters, 2017, 15(3): 33401-33405

CrossRef返回数据

【1】Dakui Lin, Huoyao Chen, Zhengkun Liu, Kay Dietrich, Stefanie Kroker, Thomas Kaesebier, Ying Liu, Ernst-Bernhard Kley, Yilin Hong. Reducing Rowland ghosts in diffraction gratings by dynamic exposure near-field holography. Optics Letters, 2018, 43(4): 811 

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