应用光学, 2016, 37 (5): 747, 网络出版: 2016-10-19   

用于大孔径凸非球面检测的部分补偿透镜的优化设计

Optimization design of partially compensating lens for large aperture convex aspheric surface testing
作者单位
北京信息科技大学 光电测试技术北京市重点实验室, 北京 100101
摘要
针对部分补偿法和子孔径拼接技术对大孔径凸非球面进行测量时, 部分补偿透镜的优化设计是关键技术之一, 基于ZEMAX软件对用于大孔径凸非球面的部分补偿透镜进行了优化设计, 以波前斜率作为优化目标, 通过直接观察弥散圆半径对全口径的光线进行优化。设计结果表明, 用结构简单的单片部分补偿透镜即可实现对大孔径凸非球面的面形测量, 在不同的子孔径区域, 部分补偿系统在理想焦面处的弥散圆最大半径均小于165 μm, 满足设计要求, 验证了结合部分补偿法和子孔径拼接技术测量大孔径凸非球面的可行性。
Abstract
Optimization design of partially compensating lens is one of the key problems for large aperture convex aspheric surface testing using part-compensating lens and sub-aperture stitching. A design method for the part-compensating lens based on ZEMAX was proposed, which took the slope of wave-front as the optimization objective, and optimized the lights on the full aperture by observing the radius of dispersive spot. The results indicate that, the large aperture convex aspheric surface can be tested by a simple single part-compensating lens. In different areas of the sub aperture, the maximum radius of the dispersive spot in the ideal focal plane is less than 165 μm, which can always achieve the requirement, verifing the feasibility of testing the large aperture convex aspheric surface by part-compensating lens and sub-aperture stitching.

孟晓辰, 祝连庆. 用于大孔径凸非球面检测的部分补偿透镜的优化设计[J]. 应用光学, 2016, 37(5): 747. Meng Xiaochen, Zhu Lianqing. Optimization design of partially compensating lens for large aperture convex aspheric surface testing[J]. Journal of Applied Optics, 2016, 37(5): 747.

本文已被 1 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!