在纯平的陶瓷衬底上面, 利用磁控溅射方法镀上一层金属钛。对金属钛层进行表面缺陷处理后, 放入微波等离子体化学气相沉积腔中, 利用正交实验方法制备出场发射性能最优的薄膜, 通过扫描电镜、X射线衍射仪、拉曼光谱仪等仪器,研究了薄膜的微观表面形态、结构组成等, 得到了该薄膜是球状微米金刚石薄膜的结论。并进一步研究了最优场发射薄膜的发射机理。

A layer of thick metal titanium is plated on the flat ceramic substrate by the method of magnetron sputtering. After processing, the surface defect of metal titanium layer put in the cavity of microwave plasma chemical vapor deposition. Using the method of orthogonal experiment, the thin film of best emission is prepared. By scanning electron microscopy, X-ray diffraction instrument, Raman spectroscopy instrument, the thin film is analyzed. The conclusion of the film is globular micron diamond film. And the film mechanism of field emission is studied.