光学散射会对光学系统造成系统损耗, 成像质量下降等危害。针对高反镜的散射光在光学系统中的影响, 本文提出了使用总积分散射法来测量散射光总量, 得到散射光在总反射光中所占的比值。该方法运用总积分散射理论, 并结合积分球的光度特性, 搭建了比较法总积分散射仪, 测试了镀银膜的高反镜的总积分散射。实验结果表明, 该装置测得的总积分散射值与用德国汉诺威激光中心生产的总积分散射仪得到的测量结果非常接近, 均在 300 ppm~500 ppm之间, 验证了该装置的可行性。

Scattered light will cause the loss of system, damage the imaging quality of optical system and cause other hazards. According to the impact of scattered light of high reflective mirror in the optical system, the total integrated scattering method is put forward for measuring the total integrated scattering optic to get the ratio of the scattered light to the total reflected light. This method applies the theory of the total integrated scattered, considering about the photometric characteristic of integrating sphere. According to the principle of the method, a set of scatterometer is built, and the scattering of high reflective mirror is measured. After experimental verification, the result obtained by this scatterometer is very close to the consequence obtained by the scatterometer produced by Germany Laser Zentrum Hannover e.v. The values of Total Integrated Scattering (TIS) are both between 300 ppm and 500 ppm, which proves the feasibility of the self-made device.