提出了一种离子束刻蚀制备线性渐变滤光片(LVOF)的方法。离子束刻蚀过程中,通过在样片和离子束出射窗口之间加入开有三角形透射窗口的挡板以及样片水平方向多次来回运动完成楔形谐振腔层制备,配合离子束辅助反应电子束真空镀膜技术,完成线性渐变滤光片的制作。设计三组不同刻蚀次数的制作实验,制作出了工作波长为500~580 nm、线色散系数为1.03 nm·mm-1的线性渐变滤光片。实验结果表明,通过调节样品台运动速率或者刻蚀次数,能够制备出具有预期楔角谐振腔层的线性渐变滤光片。

Method of fabricating linear variable optical filters(LVOF) by ion beam etching with masking mechanisms has been proposed.A triangle-shaped mask is designed and set between the ion source and sample.During the ion etching,the sample is moved back and forth repeatedly with a constant velocity for purpose of obtaining the linearly varied thickness of the cavity.Combining with ion beam assistant thermal oxidative electron beam evaporation deposition technology,the fabrication of LVOF can be completed.Three different times for etching during ion beam etching process were designed and performed.Filtering range lies in 500~580 nm and line dispersion coefficient of 1.03 nm·mm-1 have been fabricated.The measured results indicated that by adjusting the scanning frequency and time of ion beam etching,LVOFs which have anticipated wedge-shape resonant cavity can be obtained.