红外与毫米波学报, 2016, 35 (5): 550, 网络出版: 2016-10-24
利用表面等离子体波提高铂硅红外探测器量子效率
Quantum efficiency enhancement for PtSi infrared detector by surface plasma waves
铂硅红外探测器 表面等离子波 光栅耦合 量子效率 PtSi infrared detector surface plasma waves grating coupling quantum efficiency
摘要
为提高铂硅肖特基势垒红外探测器的量子效率, 文章将平坦的铂硅-p型硅金半接触界面设计成光栅结构, 利用光栅耦合激发表面等离子波效应提高铂硅红外探测器光耦合效率.采用严格耦合波分析方法优化了光栅结构参数以及模拟了探测器在等离子共振波长处的电场分布.最后探讨了光耦合效率与铂硅红外探测器量子效率的定量关系, 发现在3~5 μm波段光栅结构的量子效率较平坦结构能提高2倍多, 在波长3 μm和3.4 μm时分别提高294和2.5倍.
Abstract
To enhance quantum efficiency of infrared detectors made of PtSi Schottky barrier, the flat interface of PtSi/p-silicon metal semiconductor was modified to a grating structure. The incident radiation can be coupled with the surface plasma waves within this structure, thus to improve the optical coupling efficiency of the PtSi infrared detector. Based on rigorous coupled-wave analysis method, parameters of the grating structure were optimized and electric field distributions at resonant wavelength were simulated. The quantitative relationship between the optical coupling efficiency and quantum efficiency of PtSi Schottky barrier infrared detector was discussed. Comparing with the flat structure, the average quantum efficiency is evenly increased twice in 3~5 μm wavelength range, and approximately 2.94 and 2.5 times at 3 μm and 3.4 μm, respectively.
康冰心, 李华高, 王岭雪, 熊平, 陈红兵, 李立, 蔡毅. 利用表面等离子体波提高铂硅红外探测器量子效率[J]. 红外与毫米波学报, 2016, 35(5): 550. KANG Bing-Xin, LI Hua-Gao, WANG Ling-Xue, XIONG Ping, CHEN Hong-Bing, LI Li, CAI Yi. Quantum efficiency enhancement for PtSi infrared detector by surface plasma waves[J]. Journal of Infrared and Millimeter Waves, 2016, 35(5): 550.