提出并实现了一种紧凑型偏振光谱仪, 该仪器采用光谱仪阵列, 使测量光谱范围覆盖可见光波段; 采用部分平行光路设计, 简化了测量配置和系统校准方法; 运用入射面旋转效应, 实现了偏振态的空间并行调制, 减少了测量时间.对多组样品测量的结果证明了该紧凑型偏振光谱仪测量的准确性.由于测量速度快、结构简单且易于在线集成, 该紧凑型偏振光谱仪作为一种实时在线测量工具极具潜力.

A new compact polarized spectrometer is reported and implemented. An array consisting of two spectrometers is employed in the proposed polarized spectrometer to enable the measurement in the entire visible spectral range, which is necessary for the measurement of different sample types. Only one polarization optical element is used in the optics system with the partially parallel optical path design, which significantly simplifies the configuration and calibration of the system. The compact polarized spectrometer utilizes the incident plane rotating effect to modulate the polarization state in space domain, which consequently reduces the measurement time. The accuracy of the proposed compact polarized spectrometer is demonstrated by measuring test samples with different thicknesses. In consideration of the advantages, such as fast speed, compact and concise structure, eases integration, the proposed instrument shows great potential to be a powerful tool for on-line measurement in thin film manufacturing.