报道了输出波长980 nm的高峰值功率垂直腔面发射激光器(VCSEL)及其微型化脉冲激光光源.通过优化VCSEL单元器件的结构, 有效抑制了宽面VCSEL结构中的非均匀电流分布, 提高了单元器件的斜率效率, 获得了直径400 μm, 峰值输出功率62 W的VCSEL单元器件; 在此基础上, 研制出由单元器件组合封装而成的VCSEL“准列阵”子模块以及集成驱动电路的微型化VCSEL脉冲激光光源, 该光源在脉冲驱动条件为30 ns、2 kHz、105 A条件下的峰值输出功率达到226 W, 光脉冲宽度35 ns, 中心波长979.4nm, 斜率效率达到2.15 W/A.

The VCSEL devices with high peak power at 980nm and miniaturized laser source were reported. The structure of VCSEL element devices was optimized to eliminate the non-uniform current density distribution within the VCSEL’s active region and therefore to enhance the slope efficiency. The peak power with a value of 62 W was achieved from VCSEL element deivce with 400 μm-diameter-active region. Based on the optimized element devices, VCSEL quasi array sub-mount and miniaturized laser source integrated with pulse generator circuit was demonstrated. Under the driving condition of 30 ns、2 kHz、105 A, the peak power as high as 226W was achieved. The laser pulse width, laser wavelength and the slope efficiency of the laser source were 35 ns, 979.4 nm and 2.15 W/A, respectively.