激光与光电子学进展, 2016, 53 (11): 111203, 网络出版: 2016-11-14
扫描哈特曼波前检测技术的误差分析研究
Error Analysis of Scanning Hartmann Wavefront Testing Technique
测量 哈特曼原理 斜率检测 波前检测 误差分析 measurement Hartmann principle slope detection wavefront testing error analysis
摘要
以斜率检测的面形重构算法为基础,结合导轨指向误差的实验标定结果,分析了导轨指向误差来源对实际检测结果的影响,并对理论分析进行了数值仿真与补偿。结果表明,基于扫描哈特曼原理的波前检测技术对高频误差不敏感;通过拟合低频误差可提高波前检测精度。该研究结果对波前检测技术的工程应用具有重要指导意义。
Abstract
Based on the surface shape reconstruction algorithm for slope detection in combination with the calibration results of the guideway pointing errors, the influence of the sources of these errors on the actual test results is analyzed and the corresponding numerical simulation and compensation are conducted for the theoretical analysis. The results show that the wavefront testing technique method based on the scanning Hartmann principle is not sensitive to the high-frequency errors, and the wavefront testing accuracy can be improved by fitting to the low-frequency errors. This finding has an important guiding significance in the engineering application of wavefront testing technique.
张昊, 闫锋, 魏海松, 陈新东, 程强. 扫描哈特曼波前检测技术的误差分析研究[J]. 激光与光电子学进展, 2016, 53(11): 111203. Zhang Hao, Yan Feng, Wei Haisong, Chen Xindong, Cheng Qiang. Error Analysis of Scanning Hartmann Wavefront Testing Technique[J]. Laser & Optoelectronics Progress, 2016, 53(11): 111203.