随着光学技术的发展, 光、机、电一体化成为趋势, 要求光学系统做到集成化、阵列化和小型化, 二元光学元件由于它在光波变换上的卓越表现受到人们的青睐。双层二元光学元件在宽波段范围内的衍射效率非常高, 但在加工时会产生很多种加工误差, 比如: 高度误差、周期误差、套刻误差等。文中基于标量衍射理论, 对在加工中可能出现的高度误差、周期误差、套刻误差等误差以及其对衍射效率的影响进行充分分析, 并进行MATLAB模拟。结果表明: 异向高度误差对衍射效率的影响大于同向高度误差对衍射效率的影响, 所以在加工时应该尽量避免异向高度误差。异向套刻误差对衍射效率的影响大于同向套刻误差对衍射效率的影响, 所以在加工时应该避免异向套刻误差。相比高度误差和套刻误差, 其他误差对衍射效率有着不同程度的影响。

With the development of optical technology, optic-mechanical-electric technology becomes a trend. An integrated, arrayed and miniaturized optical system was required. Binary optical element is famous for its excellent performance in light-wave transformation. Double-layer binary optical element has high diffraction efficiency over wide wavelength range. However, in the fabrication of double layer BOE, many errors occurred, such as height error, periodic error, multi-mask fabrication error etc.A theoretical analysis of these errors was carried out based on scalar diffraction theory, and a MATLAB simulation was implemented. The simulation result indicated that the diffraction efficiency deteriorated if the height errors occurred in different direction rather than in the same direction. Therefore, height errors from different direction should be avoid in fabrication. If the multi-mask fabrication error is occurred from different direction, the diffraction efficiency will decrease more quickly than from the same direction, so multi-mask fabrication error from different direction should be avoid as much as possible. Compared to height error and multi-mask fabrication error, other four errors have varying degrees of impact on the diffraction efficiency.